Aalborg GFM User Manual
Page 12
8
TABLE II GFM 37
MEDIUM FLOW
MASS FLOW METER*
TABLE III GFM 47
HIGH FLOW
MASS FLOW METER*
* Flow rates are stated for Nitrogen at STP
conditions [i.e. 70
F
F (21.1
F
C) at 1 atm].
For other gases use the K factor as a
multiplier from APPENDIX 2.
TABLE IV PRESSURE DROPS
CODE
L/min [N
2
]
11
0 to 15
30
20
31
30
32
40
33
50
CODE
L/min [N
2
]
40
60
41
80
42
100
50
200
60
500
70
1000
MODEL
FLOW RATE
[L/min]
MAXIMUM PRESSURE DROP
[mm H
2
O]
[psid]
[mbar]
GFM 17
up to 10
25
0.04
2.5
GFM 37
15
63
0.09
6.4
20
300
0.44
30
30
800
1.18
81
40
1480
2.18
150
50
2200
3.23
223
GFM 47
60
3100
4.56
314
100
5500
8.08
557
GFM 57
200
2720
4.0
280
GFM 67
500
3400
5.0
340
GFM 77
1000
6120
9.0
620
TABLE I GFM 17
LOW FLOW
MASS FLOW METER*
FLOW RANGES
CODE
mL/min [N
2
]
01
0 to 10
02
0 to 20
03
0 to 50
04
0 to 100
05
0 to 200
06
0 to 500
CODE
L/min [N
2
]
07
0 to 1
08
0 to 2
09
0 to 5
10
0 to 10