Multichannel Systems nanoZ manual - Manual (Page 39)

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The figures below show the measurement error in (A) impedance magnitude and
(B) phase as a function of the true impedance magnitude and test frequency,
across the working range of the nanoZ.
nanoZ model 1.1 (after re-calibration, requires nanoZ software v.1.3.2 or later):
nanoZ model 1.2:
A B
A B
better than 1%