SIGMA SQC-122c - Manual (Page 42)

Chapter 3 Menus
3-9
Each layer consists of a film (i.e. a material), plus the deposition rate and thickness that
are desired for this layer. The Layer Edit Menu provides access to these layer
parameters:
Fnl Thk
Thickness Limit
Start Mode
Ramp 1
Start Thkness
R a m p T i m e
New Rate
Ramp 2 Disabled
99.0
0:10:00
4.500
Enabled
Manual
0.000
9.000
En/Dis
A/s
h : m m : s s
k A
En/Dis
Auto/Man.
A
k A
R A T E ( A / s )
0.0
Edit Layer Menu
Exit to
Main
Prev
M e n u
Edit
T H I C K N E S S ( k A )
0.000
P O W E R ( % )
0.0
My Process 2 -> Layer 2 -> AluminumOxide
P a r a m e t e r Value Units
Init Rate 9.9 A/s
Time Setpoint 0:00:00 h : m m : s s
Exit to Main Returns to the Main Menu.
Prev Menu Returns to the Layer Select Menu.
Edit Selects the highlighted parameter for edit. SoftKey functions
change to:
Next: Store parameter and move to next for editing.
Cancel: Stop editing and undo changes to selected parameter.
Enter: Stop editing and save values for selected parameter.
Control Knob: Turn to adjust value. Push to store value and
move to next parameter.
Control Knob Scrolls through the list of layer parameters.