ORBIT FR Z-Roll Units User Manual
Page 2
ZR-10
ZR-50
ZR-100
ZR-200
Construction Grade
Aluminum
Aluminum
Aluminum
Aluminum
Motion
Manual
Motorized
Motor Drive
V
N/A
90
hp
N/A
1/20
Z Accuracy (RMS)
mm
N/A
0.05
0.07
0.09
in
N/A
0.002
0.003
0.004
Roll Accuracy (RMS)
deg
N/A
0.033
Readout Resolution Z Axis
mm
N/A
0.003
in
N/A
0.00012
Readout Resolution Roll Axis
deg
N/A
0.001
Repeatability (RMS) Z Axis
mm
N/A
0.025
in
N/A
0.001
Repeatability (RMS) Roll Axis
deg
N/A
0.05
Weight
kg
8
23
33
43
lb
18
50
73
95
Polarization Positioner
AL-060-1P
AL-160-1P
Z Travel Stage
-
AL-610-1
AL-610-2
AL-610-3