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ORBIT FR Z-Roll Units User Manual

Page 2

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ZR-10

ZR-50

ZR-100

ZR-200

Construction Grade

Aluminum

Aluminum

Aluminum

Aluminum

Motion

Manual

Motorized

Motor Drive

V

N/A

90

hp

N/A

1/20

Z Accuracy (RMS)

mm

N/A

0.05

0.07

0.09

in

N/A

0.002

0.003

0.004

Roll Accuracy (RMS)

deg

N/A

0.033

Readout Resolution Z Axis

mm

N/A

0.003

in

N/A

0.00012

Readout Resolution Roll Axis

deg

N/A

0.001

Repeatability (RMS) Z Axis

mm

N/A

0.025

in

N/A

0.001

Repeatability (RMS) Roll Axis

deg

N/A

0.05

Weight

kg

8

23

33

43

lb

18

50

73

95

Polarization Positioner

AL-060-1P

AL-160-1P

Z Travel Stage

-

AL-610-1

AL-610-2

AL-610-3