SIGMA SQM-160 - Manual (Page 17)

Chapter 2 Operation
2-6
Display Description Range Default Units
xTOOLING Tooling value assigned to each
sensor. See the Sensor Tooling
section of this chapter for
information on setting tooling
values. 10 – 399 100 %
FMIN/MAX Sub-Menu to select Crystal
Frequency Limits
FREQ MIN Minimum Crystal Frequency 4.00 – 6.00 5.00 MHz
FREQ MAX Maximum Crystal Frequency 4.10 – 6.10 6.10 MHz
The following System Parameters apply only if the optional Analog Output card is
installed. See the Options chapter for more information on setting the Analog Output
Card parameters.
Display Description Range Default Units
R/T BNDS Rate and Thickness Bounds Sub-
Menu
RATE MIN Deposition Rate for Zero Output
(Zero Volts) 0 – 999 0 Å/s
RATE MAX Deposition Rate for Full Scale
Output (+5 Volts) 9.9 – 999 100 Å/s
THICKMIN Thickness for Zero Output (Zero
Volts) 0 – 99.99 0.00 kÅ
THICKMAX Thickness for Full Scale Output
(+5 Volts) 0 – 99.99 1.00 kЕ